一.服务类型
● 依据标准中对机械、电气、风险评估要求,提供定制化培训方案。
● 样机测试和评估。
二.具体标准
SEMI S2 ⋯⋯半导体生产装置的环境、健康、安全Safety Guidelines for Semiconductor Manufacturing Equipment.
SEMI S8 ⋯⋯半导体生产装置的人机工程学Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment.
SEMI S10 ⋯⋯风险评估 Safety Guideline for Risk Assessment.
SEMI S17 ⋯⋯SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEM